PBN Coating

Pyrolytic boron nitride (PBN) coating is a high-purity boron nitride thin film or dense coating formed on a substrate via chemical vapor deposition (CVD). It is typically used in high-temperature, high-vacuum, or semiconductor epitaxial growth equipment to enhance the material’s high-temperature resistance, corrosion resistance, and electrical insulation properties.

Characteristic

High Purity (99.999%) and Excellent Hermeticity

Excellent Electrical Insulation

Extremely Low Outgassing at High Temperatures

Excellent Chemical Inertness: No reaction with acids, alkalis, salts, or organic solvents at elevated temperatures.

Strong Coating Adhesion: Dense coating with excellent bonding to the substrate, resistant to peeling or delamination.

Parameter

Property Unit Value
Density g/cm³ 1.95–2.20
Tensile Strength N/mm² 102
Flexural Strength N/mm² 243
Compressive Strength N/mm² 244
Thermal Conductivity (200°C) W/(m·K) 60 (a) / 2.60 (c)
Thermal Expansion Coefficient (200°C) K⁻¹ 2.0×10⁻⁶ (a)
Dielectric Constant (Room Temp) 5.81
Electrical Resistivity Ω·cm 2.4×10¹⁵

Application field solutions

PBN Coated Heater: Used in wafer annealing processes and related applications, featuring excellent heating uniformity and long service life.

PBN Coated Products: Complex-shaped graphite or metal components can be coated with a protective layer to provide high-temperature resistance and corrosion protection.

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