Al₂O₃ - Aluminum Oxide

High-Purity Alumina (Al₂O₃) Precision Ceramic Components for Semiconductor Manufacturing Manufactured from high-purity raw materials using advanced ceramic processing techniques, these components are designed to meet the stringent requirements of wafer processing, including ultra-cleanliness, high electrical insulation, high-temperature resistance, and strong resistance to plasma corrosion.

Characteristic

High Purity

Excellent High-Temperature Electrical Insulation

Strong Resistance to Plasma Corrosion

Excellent High-Temperature Resistance

Good Thermal Shock Resistance

Parameter

Property Unit Value
Density g/cm³ 3.6–3.9
Mohs Hardness 9
Flexural Strength MPa 300–400
Compressive Strength MPa 2000–3000
Melting Point °C ~2050
Maximum Service Temperature °C 1500–1750
Thermal Conductivity (20°C) W/(m·K) 18–36
Thermal Expansion Coefficient K⁻¹ 7.0×10⁻⁶ – 8.0×10⁻⁶
Volume Resistivity (20°C) Ω·cm >10¹⁴
Dielectric Strength kV/mm 10–35
Dielectric Constant (1 MHz) 9–10

Application field solutions

High-Temperature Crucibles / Sintering Containers: Used for semiconductor material sintering and melting. They offer high-temperature resistance, corrosion resistance, reduced contamination, and ensure material purity.

Semiconductor / LED Packaging Substrates: Provide high electrical insulation and thermal conductivity for chips, enabling efficient heat dissipation and improving device stability and lifespan.

Semiconductor Equipment Structural Components / Fixtures Used for support and positioning in vacuum and high-temperature equipment. They are resistant to high temperatures and plasma corrosion, ensuring long-term stability.

Vacuum / High-Temperature Furnace Insulation Components: Used for electrical insulation in process furnaces. They provide high-temperature resistance and anti-aging performance, ensuring safe and stable equipment operation.

Wafer Carriers / Processing Fixtures: Used for wafer handling and positioning during processing and transfer, reducing wear and contamination while improving process yield.

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