SiC Coating

SiC coatings are thin-film materials fabricated via chemical vapor deposition (CVD). Compared with monocrystalline silicon, silicon carbide features a breakdown electric field 10 times that of silicon and a bandgap three times larger than silicon. It also boasts superior high-temperature resistance, chemical corrosion resistance, outstanding wear resistance and excellent thermal conductivity.

Characteristic

Good Thermal Conductivity

Uniform Coating Thickness and High Surface Flatness

Excellent Corrosion Resistance

Good Thermal Expansion Compatibility with Graphite, Resulting in Strong Adhesion

Parameter

Property Unit Value
Density g/cm³ 3.2
Decomposition Temperature °C 2700
Hardness (HK) HK 2800
Electrical Resistivity Ω·m 0.2
Flexural Strength MPa 470
Young’s Modulus GPa 460

Application field solutions

Silicon Epitaxial Substrates: Provide a low-defect, high-thermal-conductivity support platform, ensuring uniform epitaxial layer growth and effective heat dissipation.

Single-Crystal Silicon Manufacturing Equipment Components: Used as crucible liners, flow-guiding, and thermal insulation structures. They are resistant to high temperatures and corrosion, preventing contamination of molten silicon.

MOCVD Substrates: Used as base substrates for GaN epitaxial growth, directly influencing the quality and performance of the epitaxial layer.

Heater Components: Used in high-temperature heating systems to provide a uniform and stable heat source.

Heat Sink Components: Used for rapid heat conduction and dissipation to maintain stable equipment temperature.

Anti-Oxidation Components: Used for protection in high-temperature oxidative environments, reducing oxidation-related material degradation.

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