Electrostatic Chuck: An electrostatic chuck (ESC) operates based on electrostatic adsorption principles and consists of an electrode layer, insulating layer, substrate, and temperature-control gas channels. By applying voltage, an electrostatic field is generated to securely hold the workpiece. It offers non-contact clamping, uniform holding force, compatibility with vacuum and wide temperature ranges, and integrated thermal control capability. It is a key component in advanced manufacturing, serving as a replacement for traditional mechanical clamping systems.
