PBN/PG Composite Heater: New heater developed from CVD technology, with pyrolytic boron nitride (PBN) as insulation layer and pyrolytic graphite (PG) as conductive heating element, engineered with superior material properties of PBN and PG.
OLED Evaporation Deposition: Provides uniform substrate heating and precise temperature control during OLED panel manufacturing, protecting organic emissive materials and ensuring stable deposition quality.
Thin-Film Solar Cells: Used for substrate preheating and temperature regulation in CIGS solar cell production, improving crystal quality and enhancing photovoltaic conversion efficiency.
MBE Molecular Beam Epitaxy (MBE): Enables precise substrate heating in ultra-high vacuum environments, supporting high-quality epitaxial growth of semiconductor thin films.
Wafer Thermal Processing: Provides stable wafer heating and accurate temperature control in semiconductor CVD, ALD, and related processes, ensuring consistent thin-film deposition and thermal treatment results.
