How Electrostatic Chucks Impact Semiconductor Yield
In advanced semiconductor manufacturing, the Electrostatic Chuck (ESC) is a critical component that plays a direct role in wafer yield, process stability, and temperature control. Its function goes far beyond simply “holding the wafer.” In processes such as plasma etching, thin film deposition, ion implantation, and MOCVD epitaxy, wafers must remain stable under vacuum, high-temperature,…
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