Pyrolytic Boron Nitride Insulation Ring (PBN Insulation Ring) is a high-performance ceramic component prepared via the CVD process. Its core features include ultra-high purity (99.999%), excellent high-temperature stability (up to 2200 °C), strong chemical inertness, as well as superior thermal shock resistance and electrical insulation properties.
Applications:
Semiconductor Industry:Used in MBE, MOCVD, PVD, and other equipment as heating chamber components, electrode insulators, and structural parts inside reaction chambers, providing electrical insulation and thermal isolation.
Vacuum Coating Equipment:Serves as an insulating component for evaporation sources, ion sources, and target supports, preventing current leakage or short circuits at high temperatures.
Crystal Growth Equipment:Applied as insulating support rings in single-crystal growth furnaces for sapphire, silicon carbide (SiC), and gallium nitride (GaN), ensuring uniform thermal fields and stable equipment operation.
High-Temperature Experimental Equipment:Used as electrode spacers and insulating structures in heating systems for heat treatment furnaces and analytical instruments.
Industrial Electric Heating Systems:Employed in vacuum furnaces, graphite heaters, and tungsten-molybdenum electrode assemblies to enhance system insulation performance and extend service life.
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