CVD ceramics are advanced high-purity specialty ceramic materials prepared via the Chemical Vapor Deposition (CVD) process. In a high-temperature vacuum environment, gaseous precursors undergo chemical reactions, allowing material to be deposited from the gas phase layer by layer onto a substrate surface. After cooling, high-purity and highly dense CVD ceramic materials are formed.
Powder-based ceramics are traditional hot-pressed and sintered advanced ceramics. They are fabricated from high-purity ceramic powders through forming and high-temperature sintering processes to achieve final densification and shaping.
High-purity graphite modification is an advanced surface treatment technology. It enhances the overall performance of the material in high-temperature, corrosive, and semiconductor environments by depositing functional coatings on the surface of high-purity graphite substrates.
A key functional component in semiconductor process systems, primarily used in wafer processing, vacuum deposition, and precision temperature control during critical manufacturing steps.
