High purity: dense and pore-free surface, no impurity precipitation at high temperatures, and capable of maintaining a vacuum of 1.333×10⁻⁵ Pa at approximately 1800 °C.
Excellent high-temperature resistance: its strength increases with rising operating temperature, reaching a peak at 2750 °C and sublimating at 3600 °C.
Excellent thermal shock resistance: low elastic modulus, high thermal conductivity, and a low coefficient of thermal expansion.
Excellent chemical stability: resistant to corrosion by acids, alkalis, salts, and organic reagents.
| Performance | Unit | Value |
|---|---|---|
| Purity | / | 99.9999% |
| Bending Strength | N/mm² | 127 |
| Thermal Conductivity (200°C) | W/(m·K) | 376 (a); 2.0 (c) |
| Thermal Expansion Coefficient (50-800°C) | K⁻¹ | 1.26×10⁻⁶ (a) |
| Resistivity | Ω·cm | 2×10⁻⁴ |
| Maximum Operating Temperature | °C | 3600 |
Semiconductor Wafer Carrier Coating: Covers the surface of the carrier to form a dense protective layer, preventing scratches, metal ion or particle contamination caused by direct contact between the carrier and the wafer.
Coating for Key Semiconductor Equipment Components: Applied as a surface coating for CVD equipment liners, ion implanter chambers, high-temperature annealing furnace components, and more.
OLED Evaporation Field: Used in vacuum evaporation coating devices; it does not release impurities or gases under high temperature and high vacuum, ensuring no impact on coating purity.
Atomic Absorption Testing Equipment: Pyrolytic graphite-coated graphite tubes for atomic absorption spectrometers offer superior oxidation resistance and chemical reagent corrosion resistance compared to ordinary graphite tubes.
No. 88, Nanhuan East Road, Yucheng City, Shandong Province
