High purity, dense surface, no pores, and no gas release at high temperatures. It can maintain a vacuum of 1.333×10⁻⁵ Pa at around 1800°C.
High temperature resistance; its strength increases with the rise of service temperature, reaching the maximum value at 2750°C and sublimating at 3600°C.
High thermal shock resistance, low elastic modulus, high thermal conductivity, and low coefficient of thermal expansion.
Good chemical stability, resistant to corrosion by acids, alkalis, salts, and organic reagents.
| Property | Property | Unit | Value |
| Product Purity | Product Purity | / | 99.999% |
| Flexural Strength | Flexural Strength | N/mm² | 127 |
| Thermal Conductivity | (at 200°C) | W/(m·K) | 376 (a)2.0 (c) |
| Coefficient of Thermal Expansion | (at 50–800°C) | T.α/(1/K) | 1.26×10⁻⁶ (a) |
| Resistivity | Resistivity | Ω·cm | 2×10⁻⁴ |
| Maximum Service Temperature | Maximum Service Temperature | °C | 3600 |
Coating for Semiconductor Wafer Carriers：It covers the carrier surface to form a dense protective layer, avoiding scratches, metal ion or particle contamination caused by direct contact between the carrier and the wafer.
Coating for Key Semiconductor Equipment Components：Used as a surface coating for CVD equipment liners, ion implanter chambers, components of high-temperature annealing furnaces, etc.
OLED Evaporation Field：Used in vacuum evaporation coating equipment; it does not release impurities or gases under high temperature and high vacuum, and will not affect the coating purity.
Atomic Absorption Testing Equipment：The pyrolytic graphite-coated graphite tube for atomic absorption spectrometers has stronger resistance to oxidation and chemical reagent corrosion than ordinary graphite tubes.
No. 88, Nanhuan East Road, Yucheng City, Shandong Province
