CVD Composite Ceramics

Ceramic composite products prepared by Chemical Vapor Deposition (CVD). These products feature high purity, excellent density, high-temperature resistance, and corrosion resistance, and are commonly used for precision components in extreme environments.

Characteristic

High Purity and Density:Purity up to 99.999% or higher, with a dense, non-porous surface and excellent airtightness; helium permeability as low as 1×10⁻¹⁰ cm³/s.

High-Temperature Resistance and Thermal Performance: Withstands high temperatures up to 2200°C, and its strength increases with rising temperature. It has excellent thermal shock resistance and anisotropic thermal conductivity (60 W/(m·K) in the a-direction at 200°C, and only 2.60 W/(m·K) in the c-direction).

Chemical Inertness: Resistant to corrosion by acids, alkalis, salts, and organic reagents; non-wetting and non-reactive with most molten metals and semiconductor materials.

Electrical and Special Properties: High resistivity (2.4×10¹⁵ Ω·cm), high dielectric strength (56 kV/mm at room temperature), low dielectric constant and dielectric loss tangent, as well as good microwave and infrared transmission performance.

Anisotropy and Mechanical Properties: Exhibits significant anisotropy in mechanical, thermal, and electrical properties; tensile strength is 102 N/mm², and flexural strength is 243 N/mm².

Parameter

Property Unit Value
Density g/cm³ 1.95-2.20
Tensile Strength N/mm² 102
Flexural Strength N/mm² 243
Compressive Strength N/mm² 244
Thermal Conductivity (at 200°C) W/(m·K) 60 (a-direction); 2.60 (c-direction)
Coefficient of Thermal Expansion (at 200°C) T.α/(1/K) 2.0×10⁻⁶ (a-direction)
Dielectric Constant (Room Temperature) / 5.81
Resistivity Ω·cm 2.4×10¹⁵

Application field solutions

High-Temperature Heating and Insulation Components:PBN/PG (Pyrolytic Boron Nitride/Pyrolytic Graphite) composite heater coatings, used in wafer annealing processes, etc., featuring good heating uniformity and long service life.Insulating coatings for graphite heaters, insulating plates in MOCVD (Metal-Organic Chemical Vapor Deposition) systems, and insulating components in high-temperature vacuum furnaces.Insulating protection tubes for high-temperature thermocouples, providing good airtightness, corrosion resistance, and thermal shock resistance.

Special Metallurgy and Processing:PBN coatings for special-shaped graphite parts or metal parts, providing a high-temperature resistant and corrosion-resistant protective layer.

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