CVD Composite Ceramics

PBN/PG ceramic composite heater prepared by chemical vapor deposition (CVD).

Characteristic

Ultra-high purity (≥99.999%)

PBN and PG exhibit excellent chemical stability and resistance to acid and alkali corrosion

Uniform heating

Can be fabricated into complex geometries

Can be rapidly heated to 1700 °C in an inert atmosphere or under vacuum

Parameter

Performance Unit Value
Density g/cm³ 1.95~2.20
Tensile Strength N/mm² 102
Bending Strength N/mm² 243
Compressive Strength N/mm² 244
Thermal Conductivity (200°C) W/(m·K) 60 (a) / 2.60 (c)
Thermal Expansion Coefficient (200°C) K⁻¹ 2.0×10⁻⁶ (a)
Dielectric Constant (Room Temperature) / 5.81
Resistivity Ω·cm 2.4×10¹⁵

Application field solutions

Used as heaters in equipment such as MBE, MOCVD, and PECVD.

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