High Purity and Density：The CVD process enables precise control of composition and structure, making pyrolytic boron carbide far surpass traditional sintering/hot-pressing formed boron carbide in terms of purity and density.
Excellent Mechanical Properties：It is one of the hardest materials in nature besides diamond and cubic boron nitride (CBN). The CVD pyrolytic process further optimizes its microstructure (e.g., fine grains, no defects), resulting in more prominent mechanical properties.
Outstanding High-Temperature Resistance and Thermal Stability：Its stable crystal structure (trigonal crystal system) and dense microscopic morphology allow it to withstand extreme high-temperature environments.
Excellent Chemical Inertness：It has extremely high chemical stability and exhibits excellent resistance to most strong acids, strong alkalis, molten metals, and corrosive gases.
| Property | Unit | Value |
| Density | g/cm³ | 2.52 |
| Lattice Constant | Å | a=2.5, c=4.3 |
| Flexural Strength | MPa | 400 |
| Elastic Modulus | GPa | 450-470 |
| Thermal Conductivity | W/(m·K) | 42 |
| Coefficient of Thermal Expansion | mm/mm/K | 5×10⁻⁶ |
| Resistivity | Ω·cm | 0.1-10 |
| Vickers Hardness | GPa | 38 |
| Melting Point | °C | 2450 |
In plasma etching equipment, boron carbide has higher hardness and better corrosion resistance than silicon carbide, and thus can replace the application of silicon carbide etching rings in plasma etchers.
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