High Purity & Density: The CVD process enables precise control of composition and structure, making pyrolytic boron carbide far superior in purity and density to conventionally sintered/hot-pressed boron carbide.
Excellent Mechanical Properties: It is one of the hardest materials in nature, surpassed only by diamond and cubic boron nitride (CBN). The CVD pyrolysis process further optimizes its microstructure (e.g., fine grains, defect-free), enhancing its mechanical performance.
Outstanding High-Temperature Resistance & Thermal Stability: Its stable crystal structure (trigonal system) and dense microscopic morphology allow it to withstand extreme high-temperature environments.
Excellent Chemical Inertness: It exhibits extremely high chemical stability, offering outstanding resistance to most strong acids, strong alkalis, molten metals, and corrosive gases.
| Property | Unit | Value |
| Density | g/cm³ | 2.52 |
| Lattice Constant | Å | a=2.5, c=4.3 |
| Flexural Strength | MPa | 400 |
| Elastic Modulus | GPa | 450-470 |
| Thermal Conductivity | W/(m·K) | 42 |
| Coefficient of Thermal Expansion | mm/mm/K | 5×10⁻⁶ |
| Resistivity | Ω·cm | 0.1-10 |
| Vickers Hardness | GPa | 38 |
| Melting Point | °C | 2450 |
In plasma etching equipment, boron carbide has higher hardness and better corrosion resistance than silicon carbide, and thus can replace the application of silicon carbide etching rings in plasma etchers.
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