Process Tube

Product Overview

PG Process Tube is a tubular functional component made from high-purity graphite or ceramic, with a dense pyrolytic graphite (PG) coating applied via CVD. Its key features include uniform thermal conductivity, high-temperature resistance, low chemical reactivity, low gas permeability, and a smooth surface, which reduces material adhesion and contamination. It is suitable for demanding environments such as vacuum or inert atmospheres, has high structural strength, and can be used stably for long-term, continuous high-temperature processes.

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Product Details

Applications:

Semiconductor Manufacturing:Serves as a reaction tube carrier, providing uniform heat transfer to maintain consistent wafer temperatures and low contamination, ensuring precise semiconductor doping.

Material Synthesis:Used for carbon material carburization and ceramic sintering, offering a stable high-temperature environment with low gas permeability to prevent atmospheric interference.

Crystal Growth Assistance:Acts as a protective sleeve for material transport, with high-temperature resistance and a smooth surface to minimize impurity adhesion to crystals.

Research and Laboratory Experiments:Functions as a reaction vessel or sample protection tube, suitable for extreme temperatures and controlled atmospheres, ensuring accurate experimental results.

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