PBN/PG Vertical Composite Heater is a device designed for high-precision, high-purity high-temperature heating applications. It features a “PBN–PG–PBN” sandwich-style vertical composite structure, combining the high-efficiency heating of PG with the stable protective properties of PBN. The heater offers excellent temperature uniformity, low outgassing, and other advantages for demanding thermal environments.
Applications:
Semiconductor Manufacturing:Provides precise heating for semiconductor substrates in MBE, MOCVD, and other processes, ensuring uniform temperature to support thin-film growth and material doping, thereby improving device performance and yield.
Superconductor and Advanced Material Preparation:Delivers high-purity heating for high-temperature pre-treatment of superconductor substrates and deposition of novel functional thin films, preventing contamination that could affect material properties.
Precision Analysis and Research Experiments:Acts as a high-precision micro-heating source for in-situ heating tests in electron microscopy and high-temperature material characterization, meeting strict requirements for temperature accuracy and environmental purity.
High-Purity Metal and Organic Material Handling:Used for preheating organic materials before OLED vacuum evaporation and low-temperature annealing of high-purity metals. The chemical inertness of PBN prevents material contamination, ensuring product purity.
Specialized Electronic Device Manufacturing:Provides low-interference, high-precision localized heating during chip packaging for high-frequency microwave devices and infrared detectors, avoiding thermal damage to sensitive structures and ensuring stable electrical performance.
No. 88, Nanhuan East Road, Yucheng City, Shandong Province