SiC - CVD Silicon Carbide

SiC coating products are thin layers deposited on sensitive components using the Chemical Vapor Deposition (CVD) process. Compared with silicon, silicon carbide materials offer multiple advantages, including 10 times the breakdown electric field strength and 3 times the band gap. These properties endow the material with high temperature resistance, chemical resistance, excellent wear resistance, and thermal conductivity.

Characteristic

High heat resistance

High purity (prevents contamination of final products)

High-density coating

Long service life

Parameter

Property Unit Value
Bulk Density Mg/m³ 3.2
Decomposition Temperature °C 2700
Hardness HK 2800
Resistivity Ω·m 0.2
Flexural Strength MPa 170
Young’s Modulus GPa 320

Application field solutions

Substrates for silicon epitaxial growth

Monocrystalline silicon manufacturing equipment

MOCVD substrates

Heaters

Heat sinks

Oxidation-resistant components

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