SiC Coating

SiC coating products are thin layers applied to sensors using the chemical vapor deposition process. Compared to silicon, silicon carbide materials offer multiple advantages, including 10 times the breakdown electric field strength and 3 times the bandgap, endowing the material with high temperature resistance, chemical resistance, excellent wear resistance, and thermal conductivity.

Characteristic

Excellent thermal conductivity

Uniform coating thickness and high flatness

Excellent corrosion resistance

Good matching of thermal expansion coefficient with graphite and strong bonding strength

Parameter

Property	Unit	Value
Bulk Density	Mg/m³	3.2
Decomposition Temperature	°C	2700
Hardness	HK	2800
Resistivity	Ω·m	0.2
Flexural Strength	MPa	170
Young’s Modulus	GPa	320

Application field solutions

Substrates for silicon epitaxial growth, monocrystalline silicon manufacturing equipment, MOCVD substrates, heaters, heat sinks, and oxidation-resistant components.

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