Si₃N₄ - Silicon Nitride

Silicon nitride ceramics feature high fracture toughness and mechanical impact resistance, excellent thermal shock resistance, and high mechanical strength at high temperatures. They also have low density, high hardness, wear and corrosion resistance, and self-lubricating properties. With strong chemical inertness, excellent electrical insulation and low thermal expansion coefficient, they can be customized by precision machining.

Characteristic

High fracture toughness and resistance to mechanical impact

Outstanding thermal shock resistance

High mechanical strength, especially at high temperatures

Low density and high hardness

Wear resistance and corrosion resistance

Self-lubricity

Parameter

Property Unit Value
Crystal Structure Hexagonal system (α, β-phase)
Density g/cm³ 3.2 – 3.3
Mohs Hardness 8 – 9
Flexural Strength MPa 600 – 1000+
Fracture Toughness (KIC) MPa·m¹/² 5 – 8
Melting Point/Decomposition Point °C Decomposes at 1900°C under atmospheric pressure
Maximum Service Temperature °C 1200 – 1400 (in air)
Thermal Conductivity (20°C) W/(m·K) 15 – 30
Coefficient of Thermal Expansion ×10⁻⁶/K 3.0 – 3.5
Volume Resistivity (20°C) Ω·cm 10¹³ – 10¹⁵
Dielectric Constant (1MHz) 8.0 – 9.5

Application field solutions

Key components for epitaxy equipment, wafer carrier protective parts, as well as high-temperature insulating components, heat dissipation substrates and plasma etching process protective parts in semiconductor manufacturing.

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